In the low-pressure plasma technology, gas is excited in a vacuum by supplying electrical energy. This results in energetic ions and electrons, as well as other reactive particles, which constitute the plasma. Surfaces can then be effectively altered.
There are three plasma effects:
- physical removal of material by ion bombardment;
- chemical reaction of the ionized gas with the surface;
- UV radiation breaks down long-chain carbon compounds.
The effect of the plasma changes by varying the process parameters such as pressure, power, process time, gas flow and composition.
This equipment is located at Surfix (Plus Ultra, Bronland 12, Wageningen Campus).